Precision Stages

VRGシリーズ

Versatile Robust H and T Drive Gantry

VRG シリーズ

 
  • Direct drive, zero backlash linear motor
  • Versatile gantry with T rive or H drive configuration, with options of various iron core motors (ACM series) or ironless motors (AUM series)
  • T type measurement using direct linear positioning encoder of resolution 0.5µm, 1µm or versatile sin/cos encoder; or H type measurement using dual encoders on the bottom axes for better positional accuracy and repeatability
  • High motor constant offers high peak and continuous force which provides fast motion timing
  • Stable and consistent motion performance with short settling time to achieve higher throughput
 
Specifications Model VRG510
Drive Type1 T or H
Axis Top Bottom
Model Motor ACM-L50 ACM3-S1
Performance Parameter Unit
Continuous Force coil at 100℃ N 182 293
Peak Force N 831.4 878
Motor Constant N/SqRt(W) 25.6 29.4
Continuous Power W 50.3 99.1
Peak Power W 1050.6 891.6
Magnetic Period mm 20 42
Max Coil Temperature 130 130
Continuous Current Arms 4.2 4.8
Peak Current Arms 19.2 14.4
Force Constant N/Arms 43.3 61.0
Back EMF Constant Vpeak/(m/s) 35.4 49.8
Inductance mH 10.4 38.0
Phase Resistance @25℃ Ohms 2.85 4.30
Magnetic Attraction N 1619 1.45
 
Model Drive Type Axis Effective Stroke Moving Mass Total Mass Sensor Position Hard Stopper Position
(mm) (Kg) (Kg) (mm) (mm)
VRG510 T or H Top 510 4.6 29 514 530
Bottom 510 34.8 103 514 530

Note that granite mass is approx. 778Kg.

 

Part Numbering (Rapid Delivery Series)

VRG Stroke Drive1 Top Axis
Motor Model4
Bottom Axis Motor Model5 Sensor
Type
Measurement
Type3
Encoder Resolution (µm) Rail Clearance
Height6
(mm)
510 T
H
T1-ACM1-L50 B1-ACM1-L50
B2S-ACM3-S-S1
B2P-ACM3-P-S1
J
K
T
H
0.5
1.0
T Default-165
180-180
200-200

1. In T-drive gantry, there is only 1 motor at the bottom axis whereas H-drive gantry as 2 motors at the bottom axis for better performance.

2. All measurement taken when the stage is mounted on a 5 micron flat granite base and with 8kg load.

3. For T-measurement, there is only 1 linear encoder at the bottom axis. For H-measurement, there are 2 encoders at the bottom axis for better performance.

4. The preferred motors for the top axis are in the table above. For other motors e.g. AUM series, please contact us for more details.

5. The preferred motors for the bottom axis are in the table above. For other motors e.g. AUM series, please contact us for more details.

6. Clearance height is the distance measured from granite top to the bottom of the top axis carriage. Please refer to Figure 1 and 2. The minimum clearance is 165mm by default.

7. For applications that have specific straightness and flatness requirements, please contact us for more details.

 

Example: VRG510-T-T1-B2S-J-T-1.0-T-180


 
Specifications Model VRG620
Drive Type1 T or H
Axis Top Bottom
Model Motor ACM-L50 ACM1-L50
Performance Parameter Unit
Continuous Force coil at 100℃ N 182 182
Peak Force N 831.4 831.4
Motor Constant N/SqRt(W) 25.6 25.6
Continuous Power W 50.3 50.3
Peak Power W 1050.6 1050.6
Magnetic Period mm 20 20
Max Coil Temperature 130 130
Continuous Current Arms 4.2 4.2
Peak Current Arms 19.2 19.2
Force Constant N/Arms 43.3 43.3
Back EMF Constant Vpeak/(m/s) 35.4 35.4
Inductance mH 10.4 10.4
Phase Resistance @25℃ Ohms 2.85 2.85
Magnetic Attraction N 1619 1619
 
Model Drive Type Axis Effective Stroke Moving Mass Total Mass Sensor Position Hard Stopper Position
(mm) (Kg) (Kg) (mm) (mm)
VRG620 T or H Top 620 4.85 32 624 630
Bottom 620 38.3 122 624 630

Note that granite mass is approx. 778Kg.

 
 

Part Numbering (Rapid Delivery Series)

VRG Stroke Drive1 Top Axis
Motor Model4
Bottom Axis Motor Model5 Sensor
Type
Measurement
Type3
Encoder Resolution (µm) Rail Clearance
Height6
(mm)
620 T
H
T1-ACM1-L50 B1-ACM1-L50
B2S-ACM3-S-S1
B2P-ACM3-P-S1
J
K
T
H
0.5
1.0
T Default-165
180-180
200-200

1. In T-drive gantry, there is only 1 motor at the bottom axis whereas H-drive gantry as 2 motors at the bottom axis for better performance.

2. All measurement taken when the stage is mounted on a 5 micron flat granite base and with 8kg load.

3. For T-measurement, there is only 1 linear encoder at the bottom axis. For H-measurement, there are 2 encoders at the bottom axis for better performance.

4. The preferred motors for the top axis are in the table above. For other motors e.g. AUM series, please contact us for more details.

5. The preferred motors for the bottom axis are in the table above. For other motors e.g. AUM series, please contact us for more details.

6. Clearance height is the distance measured from granite top to the bottom of the top axis carriage. Please refer to Figure 1 and 2. The minimum clearance is 165mm by default.

7. For applications that have specific straightness and flatness requirements, please contact us for more details.

 

Example: VRG620-T-T1-B2S-J-T-1.0-T-180

 
 
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